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 PROCESS & VACUUM TECHNOLOGY

Benelux Process supplies in association with several top successful European technology enterprises  vacuum equipment and  vacuum process technology.

Analytical process tools and workstations for ; plasma characterization, SIMS surface science, TPD thermal desorption studies. RGA residual gas analysis. Gas analysis instruments for catalysis studies, fuel cell caracterisation, bio fuel analysis for production facilities and research institutes.

laboratory- and industrial process pumps, vacuum measuring equipment and construction components for each individual customer application.

Effective exhaust management of PECVD, CVD, ALD processes from Edwards must be able to handle the deposition gases and the associated powders. The fluoride wastes from cleaning gases also require suitable treatment along with global warming gases. Abatement systems must be able to comply with these requirements in one complete unit.

 Vacuum-, control and regulation instruments.

 Roth&RauMicrosystems advanced solutions in plasma and ion beam technology  for application in photovoltaics, micro technology, optics industries, sensor manufacturing and R&D purpose in universities and institutes.

Complete scalable  vacuum (even roll to roll) systems for process development  (PVD, PECVD, HWCVD, RIE, ALD) of photovoltaics, OLED’s, substrate surface cleaning, ion milling, ion beam figuring,  Micro wave plasma sources and ion beam sources  for optical and semiconductor applications. It doesn’t matter which size and type of substrate, (solid of flexible).

Applications:

• Deposition of active layers for solar cells, anti-reflective coating, passivation- and permeation protective coating for OLED, transparent conductive layer, DLC-films and medical coatings.
• Sputter etching of metals and deposition of thin films and diffusion barriers for semiconductor, MEMS and sensor applications.
• Reactive structuring of large-scale metal masks. 
• Stripping resist masks for large scale-RIE etching for optic applications. 
• Dry chemical texture and phosphorus glass etching for photovoltaic applications.
• Plasma polymerization based on silicon-organic precursors (HMDSO, HMDSN, TEOS, etc).

The Vacuum Systems Division of PVA TePla specializes in the development, construction and marketing of thermic plants and vacuum systems for processing high-quality materials at high temperatures.

With almost 50 years’ experience from more than 1,000 systems supplied worldwide, testimonials from big names in the industry and a diversified range of process plants, the Vacuum Systems Division of PVA TePla AG sets technological standards that have seen it grow to become a global market leader in the provision of vacuum sintering plant for hard metals in particular.

Precision Plus as a solution to your vacuum spares and accessory requirements. Our years of expertise, coupled with a determination to provide each customer with the best possible experience, means that we can be the right partner for you.

Benelux Process offers you innovative technology solutions in this domain for your research and production setups. With over 25 years of experience in the field we offer you environmentally friendly technology, products and our services.

We are happy to provide both, consultancy and customer friendly support and advice as appropriate.

Please contact us for more detailed information.

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